固相反应法合成黄铜矿型CuInSe_2多晶粉末及其蒸发薄膜的光电性能分析CuInSe-2 Thin Film Prepared by Evaporation of Chalcoprite CuIn Se-2=Powder Formed by Solid-Rection
徐少辉,马忠权,郑毓峰,李东来,简基康
摘要(Abstract)：
本文用室温固相反应法和真空蒸发法分别合成了黄铜矿型CuInSe-2多晶粉末和制备了富Cu的Cu-xIn-{l-x}Se-2薄膜用XRD，ICP HALL和UVVIS波段光透射技术分别测量了样品的原子结构，化学成分及光电性能发现在两元固相反应中，InSe反应很不完全而CuSe就不能反应，而三元固相反应的粉末样品中即使有些杂质，但黄铜矿型CuInSe-2的衍射峰非常突出，而且所得粉末样品都是富Cu的，说明在固相反应过程中In有损失化学配比固相反应合成的样品在基片温度较低时其真空蒸发薄膜是非晶，高温时则是择优取向非常明显的多晶样品的禁带宽度变化不大(1.47~{1.58}eV)不同配比样品在基片温度300℃时蒸发样品的禁带宽度变化很大(1.58~1.97eV)，而且电学数据变化也较大，霍尔迁移率从几十到几百cm+2/V.s，面载流子浓度从10+6到10+9/cm+2
关键词(KeyWords)： 固相反应方法;黄铜矿型;CuInSe_2多晶;XRD;光电性能
基金项目(Foundation): 国家自然科学基金!59862002
作者(Author): 徐少辉,马忠权,郑毓峰,李东来,简基康
参考文献(References)：
- 1 Stolt L,Hestrom J, Kessler J,et al .Appl Phys Lett.1993,62(6):579
- 2 Basol B M,Kapur VK,Halani A and Leidholm C. Sol Energy Mater Sol Cells,1995,37:203=
- 3 Schmidt J,Roscher HH and Labusch R. Thin Solid Films,1994,251:116=
- 4 Adurodija FO,Carter MJ and Hill R.Sol Energy Mater Sol Cells,1993,37:163=
- 5 Adurodija FO,Carter MJ and Hill R.Sol Energy Mater Sol Cells,1996,40:359=
- 6 Hama T,Ihara T,Sato H,Fujisawa H et al. Sol Energy Mater, 1991,23(2~4):380=
- 7 Rockett A,Lomasson TS,Yang LC,Talieh M,Campos P and Thorntonet JA.Conf Rec IEEE Photovoltaic Spec Conf,1988,20(2):1505=
- 8 Stratieva N,Tzvetrova E,Ganchev M,Kochev K,et al.Sol Energy Mater Sol Cells ,1997,45:87
- 9 Markus E Beck,Michael Cocivera.Thin Solid Films,1996,272:71
- 10 Andrew M Gabor,John R Tuttle,David S Albin et al.Appl Phys Lett,1994,65(2):598
- 11 Andrew M.Gabor,John R Tuttle,et al. Sol Energy Mater Sol Cells,1997,41/42:431
- 12 Joseph CM,Menon CS.J Vac Sci Technol A,1997,15(2):431
- 13 Zweibel K,Vllal HS,Mitchell RL.Conf Rec IEEE Photovoltaic Spec Conf,1988,20(2):1469
- 14 Kavcar N,Carter MJ,Hill R. Sol Energy Mater Sol Cells,1992,27:13
- 15 Chichibu S,Shioda T,Irie T,Nakaniski H.J Appl Phys,1998,84(1):522=
- 16 Srikant V,Clarke DR.J Appl.Phys,1998,83(10):5447=
- 17 Bhattacharyya D,Chaudhuri S,Pal AK.Vacuum,1992,43(4):313=
- 18 El Azhari MY,Azizan M, et al.Sol Energy Mater Sol Cells,1997,45:341=