近距离升华薄膜装置的研制及特性The Fabrication and Property of Close-Space-Sublimation System
陈树义,郑毓峰,简基康,李东来,马忠权
摘要(Abstract)：
详细介绍了近距离升华 (CSS)薄膜装置的研制及其特性 .并对利用该装置及利用射频溅射沉积的 Cd Te膜的结构进行了 XRD分析 .结果表明 ,CSS方法所得 Cd Te膜具有较大的晶粒尺度 ,结晶效果更好 .
关键词(KeyWords)： 近距离升华;薄膜;CdTe;XRD
基金项目(Foundation): 国家自然科学基金资助项目 (5 986 2 0 0 2 )
作者(Author): 陈树义,郑毓峰,简基康,李东来,马忠权
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